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CMS-Chemical Monitoring System

Server and Display screen, paging server software interface, printer

1=FIOP collect hardwired signal

2=Data concentrator combines hard wire signal to determine flow of chem to the POU, or the distribution system status

(Tool interface signals:

chem dd, tool ready, tool fault)

3= SCADA MS provides overview of distribution and CDM status

Tool(POU)

1

Digital Imput (LAN)

2

1

3

FIOP

CVB

DC

CCS SCADA

Dist safety signals:

leak, cover

3

1

CDM

CDM status signals:

Chem ready, leak, cover

BCDS Control System

3 Sub-Systems of the BCDS-System

CCS-Chemical Control System

Chemical Distribution system

(FIOP, redundant DC, controlNet and Ethernet communication Networks, PDP, Room EMO controller.)

Interconnects:

CDMs-Tools-CVBs-LSS

Data Concentrator

Power Distr Panel-PDP

Room EMO Controller

  • redundant PLC rack(A and B):
  • redundant power supplies(2x 24VDC) that power the Ethernet switch
  • a CPU
  • multiple ControlNet BRidge modules(CNBR).number of CNBR depend on number of LAN(5 LAN in D1D). each LAN has several nodes called FIOP. information is received to FIOP then send to DC thru ANCR(anunciator)
  • a Ethernet switch which supports the Ethernet LAN communication between the CMS server and the 2 PLCs.
  • the DC is equipped with programmed codes that generate appropriate signals that are sent back to the FIOP. The FIOP then generate appropriate outputs or relay outputs to the various equipment. At the same time the Ethernet module sent a signal to CMS
  • each room EMO is independent
  • the controller has a max of 32 contacts for each CDM within its room.
  • EMO contact is in series, and normally closed
  • when EMO pushed, all CDM in that room go to into their EMO shutdown sequence.
  • must be reset before any CDM can be restarted
  • a remote room EMO located outside of each room at each door is connected into the room EMO controller
  • Redundant( 2 power supplies)
  • has 7 output circuit breakers
  • has EPO push button shut off the internal power supplies, de-energized any connected load
  • monitor each internal power supply
  • supply power to the room EMO panel
  • connected to FIOP input
  • provide power to room EMO controller

4 Interconnections

Emergency exhaust vent shutdown is not connected into any of our panels

Life Safety Sys Interface

Valves Boxes

CDM interface:

Tool interface

  • 2 valves protection(AOV and MV)
  • all aqueous have the same I/O signals
  • all solvents have the same I/O signals

Contact between Tool and FIOP

  • Dry contact between CDM and FIOP
  • Allow communication between the CDM and the BCDS control System.
  • BCDS leak Alarm from CDM, CVB
  • CSS subfab from subfab CVB's
  • Room EMO from room EMO controller
  • CDM EMO: from CDM to FIOP

BCDS-CS

CVB

LSS

BCDS_CS

Signals:

BCDS-CS

Tool(POU)

FIOP

Aqueous:

Solvents:

Leak Switch: same as Aqueous

Air Pressure switch: same as Aqueous

CDM

FIOP

Tool output relay:

5 signals:

Leak float Switch: is held to the close position by a magnetic float. when the sump is filled the float rises and the switch goes to an open state. this also causes the 24v input signal to be lost and a alarm is generated. LSS is notified .

Cover signal:While door is closed, it holds the cover switches in the shut position to provide a fail-safe interlock. when the door is opened the switch will also open and generate an alarm. LSS is notified.

CSS switch and lamp: is a manual switch, held in the close position. when operator pushes the button the switch opens causing an alarm to the BCDS-CS, to LSS and also energizes the red lamp on the CVB.

CSS reset and lamp(for aqueous): when CSS is reset with the key switch the red lamp goes away.

Valve Box Maintenance Bypass and Lamp: normally closed by normal air pressure. when the key is engaged and CSS have been bypassed the yellow lamp will be lit.

Air pressure signal: the air pressure switch monitor the air pressure to the AOV. when pressure <=a 50 psi we get alarm.

Air Operated Valves: normally closes state , it uses air to open and a spring to shut . the AOV control air come from the valve box electrical section thru the pilot solenoid valves(actuated by outputs from the FIOP).

EMO

FIOP relay output :

FIOP output relay:

CDM relay output:

CSS

  • Chem ready: The BCDS-CS closes its chem ready contact when chem is ready.
  • chem demand: the tool closes its chem dd contact, then a signal is sent to the CDM, then the CDM open 1.10 valve and the pump strokes increases on the CDM.
  • Tool ready: In presence of tool EMO, leak interlock, low exhaust, the tool ready contact opens and the valve box loses its signal and close the air solenoid of the AOV.
  • CSS: the BCDS-CS de-energizes the CSS relay to shut the 1.10 valve in the CDM
  • Chem demand: the BCDS-CS energizes the chem demand when chem is ready to be received.
  • EMO status: the CDM energizes the relay to the BCDS-CS to open the FIOP input contact
  • chem ready: The CDM (in auto mode, stabilized and no CSS) energizes the chem ready relay to the FIOP-then the CDM is ready to dispense chem.
  • leak status: the leak alarm relay takes the CDM out of auto mode and send a signal to the BCDS-CS which generates a signal to the LSS

Not all tools utilize the chem ready signal in D1D

CDM

Chem ready

Solvent CVB

Aqueous CVB

FIOP

Chem dd

Does CVBs have a low air pressure alarm?

low air pressure

cover(will close supply and local AOV)

Leak

Tool

maintenance by pass

leak alarm(will close supply and local AOV)

CSS push button (will close supply and local AOV)

JVB

tool ready inactive close supply AOV

CSS reset button

leak alarm(will close supply and local AOV)

chem ready

chem demand

maintenance bypass light

CSS light

tool

chem ready

tool

PLC

chem dd

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